Standard Guide for Design of Flat, Straight-Line Test Structures for Detecting Metallization Open-Circuit or Resistance-Increase Failure Due to Electromigration [Metric]
NORMA vydaná dňa 1.1.1996
Označenie normy: ASTM F1259M-96
Poznámka: NEPLATNÁ
Dátum vydania normy: 1.1.1996
Počet strán: 2
Približná hmotnosť: 6 g (0.01 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Keywords:
design guideline, electromigration, electromigration failure, interconnect metallization, metallization open circuit, metallization resistance, microelectronic, test structure, ICS Number Code 17.220.20 (Measurement of electrical and magnetic quantities), 31.200 (Integrated circuits. Microelectronics)