ASTM F1152-02

Standard Test Method for Dimensions of Notches on Silicon Wafers (Withdrawn 2003)

NORMA vydaná dňa 10.1.2002

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The information about the standard:

Designation standards: ASTM F1152-02
Note: NEPLATNÁ
Publication date standards: 10.1.2002
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Kategória: Technické normy ASTM

Annotation of standard text ASTM F1152-02 :

Keywords:
notch, notch dimension, optical comparator, silicon, wafer, ICS Number Code 29.045 (Semiconducting materials)