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ASTM F1049-00

Standard Practice for Shallow Etch Pit Detection on Silicon Wafers

NORMA vydaná dňa 10.6.2000

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The information about the standard:

Designation standards: ASTM F1049-00
Note: NEPLATNÁ
Publication date standards: 10.6.2000
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Kategória: Technické normy ASTM

Annotation of standard text ASTM F1049-00 :

Keywords:
Defects-semiconductors, Etching, Haze, wafers (silicon)- shallow etch pit detection, test,, Microscopic examination-electronic materials, wafers (silicon)- shallowetch pit detection, test, ICS Number Code 29.045 (Semiconducting materials)