Standard Terminology Relating to Measurements Taken on Thin, Reflecting Films
NORMA vydaná dňa 1.5.2018
Označenie normy: ASTM E2444-11(2018)
Dátum vydania normy: 1.5.2018
Počet strán: 2
Približná hmotnosť: 6 g (0.01 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Keywords:
cantilevers, definitions, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, stiction, strain gradient, terminology, test structure,, ICS Number Code 01.040.31 (Electronics (Vocabularies)), 31.240 (Mechanical structures for electronic equipment)