Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer (Withdrawn 2023)
NORMA vydaná dňa 1.5.2018
Označenie normy: ASTM E2245-11(2018)
Poznámka: NEPLATNÁ
Dátum vydania normy: 1.5.2018
Počet strán: 25
Približná hmotnosť: 75 g (0.17 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Keywords:
cantilevers, combined standard uncertainty, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, round robin, stiction, strain gradient, test structure,, ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)