ASTM E2245-02

Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer

NORMA vydaná dňa 10.10.2002

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The information about the standard:

Designation standards: ASTM E2245-02
Note: NEPLATNÁ
Publication date standards: 10.10.2002
The number of pages: 16
Approximate weight : 48 g (0.11 lbs)
Country: American technical standard
Kategória: Technické normy ASTM

Annotation of standard text ASTM E2245-02 :

Keywords:
cantilevers, combined standard uncertainty, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, stiction, strain gradient, test structure, ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)