Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer (Withdrawn 2023)
NORMA vydaná dňa 1.5.2018
Označenie normy: ASTM E2244-11(2018)
Poznámka: NEPLATNÁ
Dátum vydania normy: 1.5.2018
Počet strán: 14
Približná hmotnosť: 42 g (0.09 libier)
Krajina: Americká technická norma
Kategória: Technické normy ASTM
Keywords:
cantilevers, combined standard uncertainty, deflection measurements, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, round robin, strain gradient, test structure,, ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)