Standard Guide for Depth Profiling in Auger Electron Spectroscopy (Withdrawn 2024)
NORMA vydaná dňa 1.6.2015
Designation standards: ASTM E1127-08(2015)
Note: NEPLATNÁ
Publication date standards: 1.6.2015
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Kategória: Technické normy ASTM
Keywords:
angle lapping, angle-resolved AES, Auger electron spectroscopy, ball cratering, compositional depth profiling, cross sectioning, depth profiling, depth resolution, sputter depth profiling, sputtering, thin films,, ICS Number Code 71.040.50 (Physicochemical methods of analysis)