DIN 32566:2007-12

Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring.

NORMA vydaná dňa 1.12.2007

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The information about the standard:

Designation standards: DIN 32566:2007-12
Publication date standards: 1.12.2007
The number of pages: 9
Approximate weight : 27 g (0.06 lbs)
Country: German technical standard
Kategória: Technické normy DIN

Annotation of standard text DIN 32566:2007-12 :

Fertigungsmittel für Mikrosysteme - Spezifikation eines Maskentragrings für die Röntgentiefenlithographie.